Broadband 3D Motion Analysis of Microstructures

The Polytec MSA-100-3D Micro System Analyzer for 3D vibration analysis of microsystems now has an extended bandwidth of up to 25 MHz. Based on a novel patented measurement principle the instrument allows not only the acquisition of out-of-plane motion but of the complete 3D motion of microsystems as MEMS and also of precision mechanics parts as HGAs and secondary actuators in the data storage industry. The innovative Laser-Doppler-Vibrometer-based measurement uses just one laser beam impinging the surface under test while the light is collected from three different directions to determine the 3D motion of the sample. The MSA-100-3D features sub-pm-resolution for both out-of-plane and in-plane motion components together with high lateral resolution due to the single measurement beam concept of the instrument.